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플라즈마　화학중착법에　의한　텅스텐　박막　증착방법

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1995-01-20

Registration No.

81643

Application Date

1991-07-09

Application No.

91-11618

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/90888

Appears in Collections:

KIST Patent > Others

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