하이브리드 타입 미세조작방법 및 그 시스템

Author
김병규강현재남궁영우
Assignee
한국과학기술연구원
Regitration Date
2006-01-18
Registration No.
0545962
Application Date
2003-11-24
Application No.
2003-0083705
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/93549
Appears in Collections:
KIST Patent > 2003
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