Showing results 13 to 16 of 16
Issue Date | Title | Author(s) |
---|---|---|
- | Improvement in diffusion barrier properties of PECVD W-N thin film by low energy BF2+ implantation | 김동준; Kim Yong Tae; PARK YOUNG KYUN; 심현상; 박종완 |
- | Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane) | 심현상; 김동준; KIM CHUN KEUN; Kim Seong Il; Kim Yong Tae; 전형탁 |
- | Structural and micromechanical characteristics of low-dielectric organosilicate thin films modified by NH₃ plasma treatment | 차국헌; 주상현; 김수한; 심현상; Kim Yong Tae; 한진희; 이진규; 윤도영 |
2004-10-26 | 펄스 플라즈마 방전에 의한 박막 증착방법 | 김용태; 심현상; 이창우; 김성일 |