Browsing by Author 조철진

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Showing results 1 to 13 of 13

Issue DateTitleAuthor(s)
2018-11A Ru-Pt alloy electrode to suppress leakage currents of dynamic random-access memory capacitors김진상; 강종윤; 김성근, et al
2015-07Asymmetry in electrical properties of Al-doped TiO2 film with respect to bias voltage전우진; 라상호; 이웅규, et al
2019-12Atomic layer deposition of Ta-doped SnO2 films with enhanced dopant distribution for thermally stable capacitor electrode applications김진상; 김성근; 편정준, et al
2015-07Control of the initial growth in atomic layer deposition of Pt films by surface pretreatment편정준; 조철진; 백승협, et al
2016-11Correct Extraction of Frequency Dispersion in Accumulation Capacitance in InGaAs Metal-Insulator-Semiconductor Devices송진동; 최정혜; 김성근, et al
2018-08Engineering of AlON interlayer in Al2O3/AlON/In0.53Ga0.47As gate stacks by thermal atomic layer deposition송진동; 김성근; 박석인, et al
2014-11Enhancement of Initial Growth of ZnO Films on Layer-Structured Bi2Te3 by Atomic Layer Deposition김광천; 조철진; Joohwi Lee, et al
2014-12Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 FilmWoojin Jeon; Sijung Yoo; Hyo Kyeom Kim, et al
2017-08Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O3 as Oxygen Sources김성근; 김상태; 조철진, et al
2017-03Interface Engineering for Extremely Large Grains in Explosively Crystallized TiO2 Films Grown by Low-Temperature Atomic Layer Deposition김진상; 백승협; 김성근, et al
2018-12MoO2 as a thermally stable oxide electrode for dynamic random-access memory capacitors김성근; 조철진; 이우철, et al
2014-11SnO2 thin films grown by atomic layer deposition using a novel Sn precursor최민정; 조철진; 김광천, et al
2017-09Ta-Doped SnO2 as a reduction-resistant oxide electrode for DRAM capacitors강종윤; 김성근; 노명섭, et al

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