Showing results 2 to 3 of 3
Issue Date | Title | Author(s) |
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2021-12 | Nucleation retardation of cubic boron nitride films caused by the addition of oxygen in argon-nitrogen sputtering gas | Choi, Younghwan; Huh, J.-Y.; Baik, Young Joon |
2023-03 | Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputtering | Choi, Younghwan; J-Y. Huh; Baik, Young Joon |