Showing results 3 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
2009-09 | Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensor | Choo, Sung Joong; Lee, Byung-Chul; Lee, Sang-Myung; Park, Jung Ho; Shin, Hyun-Joon |