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Showing results 2 to 3 of 3

Issue DateTitleAuthor(s)
2021-12Nucleation retardation of cubic boron nitride films caused by the addition of oxygen in argon-nitrogen sputtering gasChoi, Younghwan; Huh, J.-Y.; Baik, Young Joon
2023-03Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputteringChoi, Younghwan; J-Y. Huh; Baik, Young Joon
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