Showing results 2 to 4 of 4
Issue Date | Title | Author(s) |
---|---|---|
2015-09 | Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture | Garay, Adrian Adalberto; Hwang, Su Min; Choi, Ji Hyun; Min, Byoung Chul; Chung, Chee Won |
2010-09 | Inductively coupled plasma reactive ion etching of titanium thin films using a Cl-2/Ar gas | Xiao, Yu Bin; Kim, Eun Ho; Kong, Seon Mi; Park, Jae Hyun; Min, Byoung Chul; Chung, Chee Won |
2006-09 | Nanometer-sized etching of magnetic tunnel junction stack for magnetic random access memory | Park, Ik Hyun; Min, Su Ryun; Park, Wang Hyun; Shin, Kyung Ho; Chung, Chee Won |