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Browsing byAuthorPark, Yongjoo

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Showing results 3 to 4 of 4

Issue DateTitleAuthor(s)
2023-09Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasmaYang, Hae Lin; Kim, Tae-Yeon; Park, Gi-Beom; Yoon, Ara; Song, Ki-cheol; Lee, Yeonhee; Park, Jongryul; Kang, Taehyeong; Park, Yongjoo; Park, Jin-Seong
2022-02-01Y-doped HfO2 deposited by atomic layer deposition using a cocktail precursor for DRAM capacitor dielectric applicationKim, Jenam; Kim, Byung Seok; Lee, Ae Jin; Han, Dong Hee; Hwang, Ji Hyeon; Kim, Youngjin; Song, Ki-Chang; Oh, Hansol; Kim, Sangho; Park, Yongjoo; Jeon, Woojin
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