Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
- | Enhancement of Reconstructed Image by Noise Reduction for Mask Inspection of EUVL (Extreme Ultra-Violet Light) Lithography | Cho Jung-gyn; Cho Sung-jin; Park, Min-Chul; Jhon, Young Min; Byeong-Kwon Ju; Jung-Young Son |
1995-01 | Integrated precision inspection system for manufacturing of moulds having CAD defined features | Pahk, H.J.; Jung, M.Y.; Hwang, S.W.; Kim, Y.H.; Hong, Y.S.; Kim, S.G. |