Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2003-07-29 | Effect of Cl/H input ratio on the growth rate of MOSi2 coatings formed by chemical vapor deposition of Si on Mo substrates from SiCl4-H-2 precursor gases | Yoon, JK; Kim, GH; Byun, JY; Lee, JK; Yoon, HS; Hong, KT |