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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1995-01High temperature thermal stability of plasma-deposited tungsten nitride Schottky contacts to GaAsLee, C.W.; Kim, Y.T.
1995-01Plasma deposited amorphous tungsten nitride diffusion barrier for metal-organic chemical vapor deposited Cu metallizationKim, Yong Tae; Lee, Chang Woo
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