Browsing bySubjectY 2 O 3 thin film

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Issue DateTitleAuthor(s)
2024-08HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperatureAhn, Soeun; Jeong, Eunbi; Jeon, Kyoungho; Lim, Sang Ho; Han, Seunghee

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