Browsing bySubjectnano-imprint lithography

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Issue DateTitleAuthor(s)
2007-01Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithographyYang, Ki-Yeon; Hong, Sung-Hoon; Kim, Deok-kee; Cheong, Byung-ki; Lee, Heon

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