Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
2007-06 | Nitrogen concentration in ZnO films grown by magnetron sputtering in an Ar-NO plasma | Kononenko, O.V.; Noh, Y.S.; Kim, T.W.; Choi, W.K. |
2003-07-01 | Relationship between residual stress and structural properties of AlN films deposited by r.f. reactive sputtering | Lee, SH; Yoon, KH; Cheong, DS; Lee, JK |