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Showing results 5 to 6 of 6

Issue DateTitleAuthor(s)
1993-01Effects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films.Kim Yong Tae; S. J. Lee; C. S. Kwon; Y. W. Park; C. C. Lee; C. W. Lee; Min Suk-Ki
1995-01New concept for amorphous diffusion barrier: Ion beam modification of metal/semiconductor interface.Kim Yong Tae; S. K. Kwak; C. S. Kwon; D. J. Kim; C. W. Lee; I. H. Choi; Min Suk-Ki
1

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