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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1995-07EFFECT OF RESIDUAL-GAS ON CU FILM DEPOSITION BY PARTIALLY-IONIZED BEAMKOH, SK; JIN, ZG; LEE, JY; JUNG, HJ; KIM, KH; CHOI, DJ
1992-05-29GROWTH OF GAMMA-AL2O3 THIN-FILMS ON SILICON BY LOW-PRESSURE METAL ORGANIC-CHEMICAL VAPOR-DEPOSITIONYOM, SS; KANG, WN; YOON, YS; LEE, JI; CHOI, DJ; KIM, TW; SEO, KY; HUR, PH; KIM, CY
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