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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2003-10Calibration of MEMS strain sensors fabricated on silicon: Theory and experimentsHautamaki, C; Cao, L; Zhou, J; Mantell, SC; Kim, TS
2000-03-15Simulation and fabrication of piezoresistive membrane type MEMS strain sensorsCao, L; Kim, TS; Mantell, SC; Polla, DL
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