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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2015-12Optical head alignment method using serial manipulators for maskless lithography systemChoi, Jong Yoon; Park, Sae Whan; Ihn, Yong Seok; Choi, Hyouk Ryeol; Moon, Hyungpil; Koo, Ja Choon
2015-12Parallel micro manipulator for optical spot array alignment of maskless lithographyLi, Zheng Yuan; Choi, Jong Yoon; Ihn, Yong Seok; Ji, Sang-Hoon; Koo, Ja Choon
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