Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2015-09 | Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture | Garay, Adrian Adalberto; Hwang, Su Min; Choi, Ji Hyun; Min, Byoung Chul; Chung, Chee Won |