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Issue DateTitleAuthor(s)
1998-12RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O-3 film and surface micromachiningYoon, YS; Kim, JH; Schmidt, AM; Polla, DL; Wang, Q; Gladfelter, WL; Shin, YH
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