Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
2002-07-20 | Hybrid neuro-fuzzy approach to the generation of measuring points for knowledge-based inspection planning | Hwang, IS; Lee, H; Ha, SD |
1999-05 | On-line control of process uniformity in single wafer processes | Ha, SD; Sachs, E |