Browsing byAuthorHa, SD

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2002-07-20Hybrid neuro-fuzzy approach to the generation of measuring points for knowledge-based inspection planningHwang, IS; Lee, H; Ha, SD
1999-05On-line control of process uniformity in single wafer processesHa, SD; Sachs, E

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