DSpace at KIST

Browsing byAuthorHahn, YB

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2001-07Dry etching of SrBi2Ta2O9 thin films in Cl-2/NF3/O-2/Ar inductively coupled plasmasIm, YH; Park, JS; Choi, CS; Choi, RJ; Hahn, YB; Lee, SH; Lee, JK
2001-02Plasma chemistries for dry etching of SrBi2Ta2O9 thin filmsPark, JS; Im, YH; Choi, RJ; Hahn, YB; Choi, CS; Lee, SH; Lee, JK
1

BROWSE