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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2015-10Evaluation of Hindrance to the Growth of SiN Passivation Layer by Contamination of Fluoride Ions in Front Opening Unified Pod (FOUP)Song, Gil Joo; Hwang, Sung Min; Koo, Soo Jong; Kim, Hyoung Ryeun; Jang, Hee Chang; Hong, Jeong Hoon; Park, Hyun Yul; Choi, Euiji; Kim, Jin Young; Noh, Tae Yong; Lee, Eungsun; Yoo, Seoung-Kyo
2017-03Influence of Fluoride Ions Contamination in Front Opening Unified Pod (FOUP) Generating Defective Bonding PadKwon, Soon Seok; Hwang, Sung Min; Kim, Hyoung Ryeun; Jang, Hee Chang; Hong, Jeong Hoon; Song, Gil Joo; Park, hyun Yul; Kim, Minsoo; Shin, Youhwan; Kim, Jin Young; Noh, Tae Yong; Yoo, Seoung-Kyo
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