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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
-A capacitively coupled plasma discharge with segmented multi-holed electrode on large areaHun-su Lee; Yun-seong Lee; Hong-young Chang
-Frequency effect of multi hole RF CCP DischargeHun-su Lee; Eun-ae Kim; Hong-young Chang
-Spatial control of RF capacitively coupled plasma using divided multi-holed electrodeHun-su Lee; Yun-seong Lee; Hong-young Chang
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