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Issue Date | Title | Author(s) |
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2021-04-16 | Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET | Lee, Kookjin; Kim, Yeonsu; Lee, Hyebin; Park, Sojeong; Lee, Yongwoo; Joo, Min-Kyu; Ji, Hyunjin; Lee, Jaewoo; Chun, Jungu; Sung, Moonsoo; Cho, Young-Hoon; Kim, Doyoon; Choi, Junhee; Lee, Jae Woo; Jeon, Dae-Young; Choi, Sung-Jin; Kim, Gyu-Tae |