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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
-HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatusJONG-YEON PARK; KIM GEUN TAE; KIM JINSEOK; 한용희; Moon Sung Wook; PARK JEONG HO
-HARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatusJONG-YEON PARK; Kuntae Kim; KIM JINSEOK; 한용희; Moon Sung Wook; PARK JEONG HO
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