DSpace at KIST

Browsing byAuthorKim, Changmok

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 1 of 1

Issue DateTitleAuthor(s)
2018-08-30Kinetics and mechanisms for ion-assisted etching of InP thin films in HBr + Cl-2 + Ar inductively coupled plasma with various HBr/Cl-2 mixing ratiosKim, Changmok; Efremov, Alexander; Lee, Jaemin; Han, Il Ki; Kim, Young-Hwan; Kwon, Kwang-Ho
1

BROWSE