Showing results 1 to 7 of 7
Issue Date | Title | Author(s) |
---|---|---|
2023-02 | Area-Selective Atomic Layer Deposition of SnS2 Nanosheets for Applications of Back-End-of-Line-Compatible Transistors | Yim, Jaegyun; Chung, Hong Keun; Ryu, Seung Ho; Kim, Han; Won, Sung Ok; Eom, Taeyong; Chung, Taek-Mo; Kim, Seong Keun |
2025-01 | Inhibitor-Assisted Atomic Layer Deposition for Uniformly Doped Ultrathin Films: Overcoming Compositional and Thickness Limitations | Kim, Taeseok; Kim, Han; Ryu, Seung Ho; Park, Gwang Min; Kim, Sung-Chul; Lee, Sung Kwang; Chung, Taek-Mo; Won, Sung Ok; Han, Jeong Hwan; Kim, Sangtae; Kim, Seong Keun |
2024-08 | Low temperature crystallization of atomic-layer-deposited SrTiO3 films with an extremely low equivalent oxide thickness of sub-0.4 nm | Chung, Hong Keun; Jeon, Jihoon; Kim, Han; Jang, Myoungsu; Kim, Sung-Chul; Won, Sung Ok; Baek, In-Hwan; Chung, Yoon Jang; Han, Jeong Hwan; Cho, Sung Haeng; Park, Tae Joo; Kim, Seong Keun |
2023-07 | Nucleation and Layer Closure Behavior of Iridium Films Grown Using Atomic Layer Deposition | Chung, Hong Keun; Kim, Han; Jeon, Jihoon; Kim, Sung-Chul; Won, Sung Ok; Harada, Ryosuke; Tsugawa, Tomohiro; Chung, Yoon Jang; Baek, Seung-Hyub; Park, Tae Joo; Kim, Seong Keun |
2025-03 | Selective Surface Passivation for Ultrathin and Continuous Metallic Films via Atomic Layer Deposition | Kim, Han; Kim, Taeseok; Kim, Min Seok; Jeon, Jihoon; Park, Gwang Min; Kim, SungChul; Won, Sung Ok; Harada, Ryosuke; Kim, Sangtae; Kim, Seong Keun |
2024-11 | Sustained Area-Selectivity in Atomic Layer Deposition of Ir Films: Utilization of Dual Effects of O3 in Deposition and Etching | Kim, Han; Kim, Taeseok; Chung, Hong Keun; Jeon, Jihoon; Kim, Sung-Chul; Won, Sung Ok; Harada, Ryosuke; Tsugawa, Tomohiro; Kim, Sangtae; Kim, Seong Keun |
2024-03 | Triboelectric Nanogenerators for Battery-Free Wireless Sensor System Using Multi-Degree of Freedom Vibration | Kim, Jihye; Lee, Dong-Min; Ryu, Hanjun; Kim, Young-Jun; Kim, Han; Yoon, Hong-Joon; Kang, Minki; Kwak, Sung Soo; Kim, Sang-Woo |