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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2016Accurate characterization of mask defects by combination of phase retrieval and deterministic approachPark, Min-Chul; Leportier, Thibault; Kim, Wooshik; Song, Jindong
2016-10Accurate characterization of mask defects by combination of phase retrieval and deterministic approachLEPORTIER, THIBAULT LOUIS DAVID; Park, Min-Chul; Kim, Wooshik; Song, Jin Dong
2015-12Deterministic Estimation of Stripe Type Defects and Reconstruction of Mask Pattern in L/S Type Mask InspectionKim, Wooshik; Park, Min-Chul
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