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Issue DateTitleAuthor(s)
2022-07Fe-substituted silica via lattice dissolution-reprecipitation replacement for tungsten chemical mechanical planarizationSun, Seho; Lee, Kangchun; Lee, Ganggyu; Kim, Yehwan; Kim, Sungmin; Hwang, Junha; Kong, Hyungoo; Chung, Kyung Yoon; Ali, Ghulam; Song, Taeseup; Paik, Ungyu
1

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