Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
---|---|---|
2013-03-26 | Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal-Insulator-Metal Capacitors | Lee, Woongkyu; Han, Jeong Hwan; Jeon, Woojin; Yoo, Yeon Woo; Lee, Sang Woon; Kim, Seong Keun; Ko, Chang-Hee; Lansalot-Matras, Clement; Hwang, Cheol Seong |