Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2009-09 | Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensor | Choo, Sung Joong; Lee, Byung-Chul; Lee, Sang-Myung; Park, Jung Ho; Shin, Hyun-Joon |