Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2017-11-29 | Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns | Seo, Seunggi; Yeo, Byung Chul; Han, Sang Soo; Yoon, Chang Mo; Yang, Joon Young; Yoon, Jonggeun; Yoo, Choongkeun; Kim, Ho-jin; Lee, Yong-baek; Lee, Su Jeong; Myoung, Jae-Min; Lee, Han-Bo-Ram; Kim, Woo-Hee; Oh, Il-Kwon; Kim, Hyungjun |