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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2012-09The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrodeLee, HunSu; Lee, YunSeong; Chang, HongYoung
2013-11-29The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasmaLee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, HongYoung
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