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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2013-03-26Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal-Insulator-Metal CapacitorsLee, Woongkyu; Han, Jeong Hwan; Jeon, Woojin; Yoo, Yeon Woo; Lee, Sang Woon; Kim, Seong Keun; Ko, Chang-Hee; Lansalot-Matras, Clement; Hwang, Cheol Seong
2013-12Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materialsLee, Sang Woon; Choi, Byung Joon; Eom, Taeyong; Han, Jeong Hwan; Kim, Seong Keun; Song, Seul Ji; Lee, Woongkyu; Hwang, Cheol Seong
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