Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
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- | Crystallization behavior of amorphous silicon thin film deposited by DC/RF magnetron sputtering with substrate bias | Lee Seung-min; Tae-Yeon Seong; JONG-KEUK, PARK |
- | Effect of gradient buffer layer prepared with different substrate bias on the adhesion of cBN film deposited by R.F. magnetron sputtering with B4C target and unipolar pulsed D.C. substrate bias | Lee Seung-min; Baik, Young Joon; Lee, Wook Seong; Tae-Yeon Seong; JONG-KEUK, PARK |