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Issue DateTitleAuthor(s)
2019-08Abnormal characteristics of etched profile on thick dielectrics for MEMS in inductively coupled plasmaLim, Nomin; Han, Il Ki; Kim, Young-Hwan; Lee, Hyun Woo; Cho, Yunsung; Kim, Jeong-Su; Im, Yeon-Ho; Kwon, Kwang-Ho
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