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Issue DateTitleAuthor(s)
2019-07Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO2/SiO2/Si filmsMin, Won Ja; Marmitt, Gabriel; Lyudmila Goncharova; Kenji Kimura; Torgny Gustafsson; Matt Copel; Jungkyu Ko; Hyung­Ik Lee; Sungho Lee; 채근화; Jaap van den Berg; Kagnwon Jung; Kyungsu Park; Igor Alencar; Grande, Pedro L.; Moon, DaeWon
1

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