Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
---|---|---|
2019-07 | Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO2/SiO2/Si films | Min, Won Ja; Marmitt, Gabriel; Lyudmila Goncharova; Kenji Kimura; Torgny Gustafsson; Matt Copel; Jungkyu Ko; HyungIk Lee; Sungho Lee; 채근화; Jaap van den Berg; Kagnwon Jung; Kyungsu Park; Igor Alencar; Grande, Pedro L.; Moon, DaeWon |