Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2007-12-03 | Characteristics of low-k SiOC(-H) films deposited at various substrate temperature by PECVD using DMDMS/O-2 precursor | Kim, Chang Young; Kim, Seung Hyun; Navarnathavan, R.; Choi, Chi Kyu; Jeung, Won Young |