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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
1997-04Nitridation of Al2O3 and GaAs surfaces by control enhanced ECR plasmaMutoh, H; OKeeffe, P; Den, S; Komuro, S; Morikawa, T; Park, YJ; Hara, K; Munekata, H; Kukimoto, H
1997-03-01Oxygen atomic flux O-* enhancement by gas-pulsed electron cyclotron resonance plasmaPark, YJ; OKeeffe, P; Ozasa, K; Mutoh, H; Aoyagi, Y; Min, SK
1997-06Study of defects generated from a nitridation of GaAs surfacePark, YJ; Kim, EK; Han, IK; Min, SK; OKeeffe, P; Mutoh, H; Munekata, H; Kukimoto, H
1996-09Transient characteristics of nitrogen gas-pulsed electron cyclotron resonance plasmaPark, YJ; Ozasa, K; OKeeffe, P; Aoyagi, Y; Min, SK
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