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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1994-09-26IN-SITU PATTERN DEPOSITION OF IN2O3 AND IN-SITU PATTERN ETCHING OF GAASOZASA, K; KIM, EK; AOYAGI, Y
1995-01IN-SITU PATTERN ETCHING OF GAAS BY TRIMETHYLINDIUM AND H2O2 GASES WITH ELECTRON-BEAM-INDUCED RESISTKIM, EK; MIN, SK; OZASA, K; AOYAGI, Y
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