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Issue DateTitleAuthor(s)
2015-10Evaluation of Hindrance to the Growth of SiN Passivation Layer by Contamination of Fluoride Ions in Front Opening Unified Pod (FOUP)Song, Gil Joo; Hwang, Sung Min; Koo, Soo Jong; Kim, Hyoung Ryeun; Jang, Hee Chang; Hong, Jeong Hoon; Park, Hyun Yul; Choi, Euiji; Kim, Jin Young; Noh, Tae Yong; Lee, Eungsun; Yoo, Seoung-Kyo
1

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