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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
2013-03Hall mobility manipulation in TiO2-x semiconductor films by hydrogen-ion irradiationYeo, C. S.; Chung, Kwun-Bum; Song, J. H.; Chae, K. H.; Park, Jin-Seong; Song, J. -H.; Park, Sang Han; Cho, Mann-Ho
2025-03Impact of hydrogen-controlled thermal ALD SiO2 insulators on IGZO channel FETs to optimize the electrical performanceChoi, Su-Hwan; Kim, Dong-Gyu; Kwag, Jae-Hyeok; Song, Ki-Cheol; Lee, Yeonhee; Park, Chang-Kyun; Park, Jin-Seong
2025-06Reduction of trap density in high-k dielectrics through optimized ALD process and high-pressure deuterium annealingHwang, Taewon; Choi, Su-Hwan; Song, Ki-Cheol; Lee, Yeonhee; Kwag, Jae-Hyeok; Lee, Jun-Yeoub; Park, Chang-Kyun; Park, Jin-Seong
2023-09Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasmaYang, Hae Lin; Kim, Tae-Yeon; Park, Gi-Beom; Yoon, Ara; Song, Ki-cheol; Lee, Yeonhee; Park, Jongryul; Kang, Taehyeong; Park, Yongjoo; Park, Jin-Seong
2024-12Unveiling the Hybrid-Channel (poly-Si/IGO) Structure for 3D NAND Flash Memory for Improving the Cell Current and GIDL-Assisted Erase OperationChoi, Su-Hwan; Sim, Jae-Min; Shin, Jeongmin; Ryu, Seong-Hwan; Hwang, Taewon; Lim, So Young; Oh, Hye-Jin; Kwag, Jae-Hyeok; Lee, Jun-Yeoub; Song, Ki-Cheol; Lee, Yeonhee; Song, Minju; Kim, Junghwan; Park, Chang-Kyun; Song, Yun-Heub; Park, Jin-Seong
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