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Issue Date | Title | Author(s) |
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2021-11-01 | Calibration of high magnification in the measurement of critical dimension by AFM and SEM | Kwak, Gyea Young; Chang, Hye Jung; Na, Min Young; Ryu, Seo Kyoung; Kim, Tae Gun; Woo, Jin Chun; Kim, Kyung Joong |