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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2026-02ALD Reactivity-Driven 2DEG-Like Interfacial Conduction in Nanolaminate InGaZnO Transistors toward High-Mobility and Stable Oxide ElectronicsKim, Yoon-seo; Kim, Daejung; Song, Ki-cheol; Lee, Yeonhee; Yoo, Hyeong-suk; Kim, Young Jae; Kim, Jonghoon; Park, Jin-seong
2023-09Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasmaYang, Hae Lin; Kim, Tae-Yeon; Park, Gi-Beom; Yoon, Ara; Song, Ki-cheol; Lee, Yeonhee; Park, Jongryul; Kang, Taehyeong; Park, Yongjoo; Park, Jin-Seong
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