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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
1994-02-01FABRICATION OF SILICON MEMBRANE USING FUSION BONDING AND 2-STEP ELECTROCHEMICAL ETCH-STOPPINGJU, BK; OH, MH; TCHAH, KH
1993-03-01INTERFACIAL OXIDE-GROWTH AND FILLING-UP BEHAVIOR OF THE MICRO-GAP IN SILICON FUSION BONDING PROCESSESJU, BK; OH, MH; TCHAH, KH
1992-11MICROSCOPY STUDIES FOR THE DEEP-ANISOTROPIC ETCHING OF (100) SI WAFERSJU, BK; HA, BJ; KIM, CJ; OH, MH; TCHAH, KH
1995-02ON THE ANISOTROPICALLY ETCHED BONDING INTERFACE OF DIRECTLY BONDED (100) SILICON-WAFER PAIRSJU, BK; LEE, YH; TCHAH, KH; OH, MH
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