Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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1999-01-01 | Thermal stability enhancement of Cu/WN/SiOF/Si multilayers by post-plasma treatment of fluorine-doped silicon dioxide | Lee, S; Kim, DJ; Yang, SH; Park, J; Sohn, S; Oh, K; Kim, YT; Kim, JY; Yeom, GY; Park, JW |