Browsing bySubject(3) insertion layer

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Issue DateTitleAuthor(s)
2022-07The Contrasting Impacts of the Al2O3 and Y2O3 Insertion Layers on the Crystallization of ZrO2 Films for Dynamic Random Access Memory CapacitorsSeo, Haengha; Yeu, In Won; Kwon, Dae Seon; Kim, Dong Gun; Lim, Junil; Kim, Tae Kyun; Paik, Heewon; Choi, Jung-Hae; Hwang, Cheol Seong

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